@article{NnAaaa,
	author="M. Maggipinto and M. Terzi and C. Masiero and A. Beghi and G.A. Susto",
	title="A Computer Vision-inspired Deep Learning Architecture for Virtual Metrology modeling with 2-Dimensional Data",
	journal="IEEE Transactions on Semiconductor Manufacturing",
	year="2018",
	month="August",
	pages="376 - 384",
	volume="31",
	number="3",
	issn="1558-2345"
}

