@article{NnAaaa,
	author="G.A. Susto and M. Terzi and A. Beghi",
	title="Anomaly Detection Approaches for Semiconductor Manufacturing",
	journal="Procedia Manufacturing",
	booktitle="27th International Conference on Flexible Automation and Intelligent Manufacturing",
	year="2017",
	pages="2018-2024",
	volume="11",
	location="Modena"
}