@inproceedings{susto2011,
	author="G.A. Susto and A. Beghi and C. De luca",
	title="A Predictive Maintenance System for Silicon Epitaxial Deposition",
	booktitle="Proceeding of 7th IEEE International Conference on Automation Science and Engineering",
	year="2011",
	pages="262-267",
	location="Trieste",
	note="Winner of the Best Student Paper Award at CASE 2011."
}