@inproceedings{de2009,
	author="C. De luca and E. Maran and J. Baumgartl and A. Beghi",
	title="Application of a Run-to-Run Controller to a Vapor Phase Epitaxy Process",
	booktitle="Proceedings of the 20th Annual ieee/semi Advanced Semiconductor Manufacturing Conference - asmc 2009",
	year="2009",
	pages="211-216"
}