@inproceedings{ClZhBiScWuDePi2000,
	author="J. Clark and N. Zhou and D. Bindel and L. Schenato and W. Wu and J. Demmel and K. Pister",
	title="3D MEMS Simulation Modeling Using Modified Nodal Analysis",
	booktitle="Proceedings of the Microscale Systems: Mechanics and Measurements Symposium",
	year="2000",
	address="Orlando FL USA"
}