@inbook{oboe2005-3,
	author="R. Oboe and E. Lasalandra and M. White",
	title="mems/nems handbook:Â  techniques And applications",
	year="2005",
	chapter="MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives",
	publisher="Kluwer Academic Publishers"
}

