@inproceedings{NnAaaa,
	author="S. Tedesco and G.A. Susto and N. Gentner and A. Kyek and Y. Yang",
	title="A Scalable Deep Learning-based Approach for Anomaly Detection in Semiconductor Manufacturing",
	booktitle="Winter Simulation Conference",
	year="2021",
	month="December",
	location="Phoenix, AZ"
}