@article{NnAaaa,
	author="S. McLoone and A.B. Johnston and G.A. Susto",
	title="A Methodology for Efficient Dynamic Spatial Sampling and Reconstruction of Wafer Profiles",
	journal="IEEE Transactions on Automation Science and Engineering",
	year="2018",
	pages="1692-1703",
	volume="15",
	number="4"
}