@inproceedings{SuBeDe2011,
	author="G.A. Susto and A. Beghi and C. De luca",
	title="A Virtual Metrology System for Predicting CVD Thickness with Equipment Variables and Qualitative Clustering",
	booktitle="Proceeding of 16th IEEE International Conference on Emerging Technologies and Factory Automation",
	year="2011",
	pages="1-4",
	location="Toulouse"
}