@inproceedings{Susto2012review,
	author="G.A. Susto and S. Pampuri and A. Schirru and G. De nicolao and S. McLoone and A. Beghi",
	title="Automatic Control and Machine Learning for Semiconductor Manufacturing: Review and Challenges",
	booktitle="10th European Workshop on Advanced Control and Diagnosis",
	year="2012",
	location="Copenhagen"
}