@article{susto2012tsm,
	author="G.A. Susto and A. Beghi and C. De luca",
	title="A Predictive Maintenance System for Epitaxy Processes based on Filtering and Prediction Techniques",
	journal="IEEE Transactions on Semiconductor Manufacturing",
	year="2012",
	month="July 10",
	pages="638	- 649",
	volume="25",
	issn="0894-6507"
}