@inproceedings{Pampuri2012,
	author="S. Pampuri and A. Schirru and G.A. Susto and G. De nicolao and A. Beghi and C. De luca",
	title="Multistep Virtual Metrology Approaches for Semiconductor Manufacturing Processes",
	booktitle="Automation Science and Engineering (CASE), 2012 IEEE International Conference on",
	year="2012",
	pages="91 -- 96",
	organization="IEEE",
	location="Seoul"
}