@inproceedings{susto2012caseR2R,
	author="G.A. Susto and A. Schirru and S. Pampuri and G. De nicolao and A. Beghi",
	title="An Information-Theory and Virtual Metrology-based approach to Run-to-Run Semiconductor Manufacturing Control",
	booktitle="Automation Science and Engineering (CASE), 2012 IEEE International Conference on",
	year="2012",
	pages="358 -363",
	organization="IEEE",
	location="Seoul"
}