@inproceedings{susto_implanter_ASMC2012,
	author="G.A. Susto and A. Schirru and S. Pampuri and A. Beghi",
	title="A Predictive Maintenance System based on Regularization Methods for Ion-Implantation",
	booktitle="23rd IEEE/SEMI Advanced Semiconductor Manufacturing Conference",
	year="2012",
	pages="175-180",
	location="Saratoga Springs"
}