@inproceedings{susto_tuning_ASMC2012,
	author="G.A. Susto and S. Pampuri and A. Schirru and A. Beghi",
	title="Optimal Tuning of Epitaxy Pyrometers",
	booktitle="23rd IEEE/SEMI Advanced Semiconductor Manufacturing Conference",
	year="2012",
	pages="294-299",
	location="Saratoga Springs"
}