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Reporitory of past Ph.D. dissertations

Publications Lists     [ all BibTeX ]  

Publications of keyword: Semiconductor Manufacturing
2017
G.A. Susto. A Dynamic Sampling Strategy based on Confidence Level of Virtual Metrology Predictions. IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 2017   [BibTeX]  
G.A. Susto, M. Terzi, A. Beghi. Anomaly Detection Approaches for Semiconductor Manufacturing. 27th International Conference on Flexible Automation and Intelligent Manufacturing, 2017   [BibTeX]  
2016
G.A. Susto, A. Beghi. Dealing with Time-Series Data in Predictive Maintenance Problems. Emerging Technologies and Factory Automation, 2016   [BibTeX]  
G.A. Susto, A. Schirru, S. Pampuri, S. McLoone. Supervised Aggregative Feature Extraction for Big Data Time Series Regression. IEEE Transactions on Industrial Informatics, vol. 12, pp. 1243 - 1252, 2016    [ abstract ] [url] [BibTeX]  
2015
G.A. Susto, A. Schirru, S. Pampuri, S. McLoone, A. Beghi. Machine Learning for Predictive Maintenance: a Multiple Classifiers Approach. IEEE Transactions on Industrial Informatics, vol. 11(3), pp. 812 - 820, 2015    [ abstract ] [url] [BibTeX]  
G.A. Susto, S. Pampuri, A. Schirru, A. Beghi, G. De nicolao. Multi-Step Virtual Metrology for Semiconductor Manufacturing: a Multilevel and Regularization Methods-based Approach. Computers & Operations Research, vol. 53, pp. 328–337, 2015    [ abstract ] [url] [BibTeX]  
2014
G.A. Susto, S. Pampuri, M. Zanon, A.B. Johnston, P.G. O’Hara, S. McLoone. An Adaptive Machine Learning Decision System for Flexible Predictive Maintenance. Conference on Automation Science and Engineering, pp. 806-811, 2014    [ abstract ] [url] [BibTeX]  
S. Pampuri, G.A. Susto, J. Wan, A.B. Johnston, P.G. O’Hara, S. McLoone. Insight Extraction for Semiconductor Manufacturing Processes. Conference on Automation Science and Engineering, pp. 786 - 791, 2014    [ abstract ] [BibTeX]  
2013
G.A. Susto, A. Schirru, S. Pampuri, D. Pagano, S. McLoone, A. Beghi. A Predictive Maintenance System for Integral Type Faults based on Support Vector Machines: an Application to Ion Implantation. Automation Science and Engineering (CASE), 2013 IEEE International Conference on, 2013    [ abstract ] [BibTeX]  
G.A. Susto, A. Beghi. A virtual metrology system based on least angle regression and statistical clustering. Applied Stochastic Models in Business and Industry, vol. 29(4), pp. 362-376, 2013    [ abstract ] [url] [BibTeX]  
G.A. Susto, S. McLoone, A. Schirru, S. Pampuri, D. Pagano, A. Beghi. Prediction of Integral Type Failures in Semiconductor Manufacturing through Classification Methods. 18-th IEEE Conference on Emerging Technologies and Factory Automation, 2013    [ abstract ] [BibTeX]  
G.A. Susto, A.B. Johnston, P.G. O’Hara, S. McLoone. Virtual Metrology Enabled Early Stage Prediction for Enhanced Control of Multi-stage Fabrication Processes. Automation Science and Engineering (CASE), 2013 IEEE International Conference on, 2013    [ abstract ] [BibTeX]  
2012
G.A. Susto, A. Schirru, S. Pampuri, A. Beghi. A Predictive Maintenance System based on Regularization Methods for Ion-Implantation. 23rd IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 175-180, 2012    [ abstract ] [url] [BibTeX]  
G.A. Susto, A. Beghi, C. De luca. A Predictive Maintenance System for Epitaxy Processes based on Filtering and Prediction Techniques. IEEE Transactions on Semiconductor Manufacturing, vol. 25, pp. 638 - 649, 2012    [ abstract ] [url] [BibTeX]  
G.A. Susto, A. Beghi. An Information Theory-based Approach to Data Clustering for Virtual Metrology and Soft Sensors. 3rd International conference on CIRCUITS, SYSTEMS, CONTROL, SIGNALS, pp. 198--203, 2012    [ abstract ] [url] [BibTeX]  
G.A. Susto, A. Schirru, S. Pampuri, G. De nicolao, A. Beghi. An Information-Theory and Virtual Metrology-based approach to Run-to-Run Semiconductor Manufacturing Control. Automation Science and Engineering (CASE), 2012 IEEE International Conference on, pp. 358 -363, 2012    [ abstract ] [url] [BibTeX]  
G.A. Susto, S. Pampuri, A. Schirru, G. De nicolao, S. McLoone, A. Beghi. Automatic Control and Machine Learning for Semiconductor Manufacturing: Review and Challenges. 10th European Workshop on Advanced Control and Diagnosis, 2012    [ abstract ] [BibTeX]  
A. Schirru, G.A. Susto, S. Pampuri, S. McLoone. Learning from Time Series: Supervised Aggregative Feature Extraction. 51st IEEE Conference on Decision and Control, pp. 5254--5259, 2012    [ abstract ] [url] [BibTeX]  
G.A. Susto, A. Beghi. Least Angle Regression for Semiconductor Manufacturing Modeling. Control Applications (CCA), 2012 IEEE International Conference on, pp. 658--663, 2012    [ abstract ] [url] [BibTeX]  
S. Pampuri, A. Schirru, G.A. Susto, G. De nicolao, A. Beghi, C. De luca. Multistep Virtual Metrology Approaches for Semiconductor Manufacturing Processes. Automation Science and Engineering (CASE), 2012 IEEE International Conference on, pp. 91 -- 96, 2012    [ abstract ] [url] [BibTeX]  
G.A. Susto, S. Pampuri, A. Schirru, A. Beghi. Optimal Tuning of Epitaxy Pyrometers. 23rd IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 294-299, 2012    [ abstract ] [url] [BibTeX]  
2011
G.A. Susto, A. Beghi, C. De luca. A Predictive Maintenance System for Silicon Epitaxial Deposition. Proceeding of 7th IEEE International Conference on Automation Science and Engineering, pp. 262-267, 2011    [ abstract ] [url] [BibTeX]  
G.A. Susto, A. Beghi, C. De luca. A Virtual Metrology System for Predicting CVD Thickness with Equipment Variables and Qualitative Clustering. Proceeding of 16th IEEE International Conference on Emerging Technologies and Factory Automation, pp. 1-4, 2011    [ abstract ] [url] [BibTeX]