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Implementing Manufacturing science solutions to increase equiPment pROductiVity and fab pErformance

Project Coordinator: F. Fink (STMicroelectronics)
Local CoordinatorA. Beghi
People: A. Beghi, S. Vitturi, G.A. Susto
Target applications: Semiconductor Manufacturing
Related research areasAdvanced Control Applications
Keywords: Semiconductor Manufacturing, Virtual Metrology, Predictive Maintenance 
Funding: EU FP7
Starting date: January 2009
Ending date: December 2011
Official Webpagehttp://www.eniac-improve.eu
Description: Maintaining cost decrease per function, reducing cycle times, improving reproducibility and equipment effectiveness while reducing the environmental impact of the factories are key challenges to be addressed to keep the competitiveness of European SC manufacturers. Manufacturing Science is the main enabler that will allow overcoming these challenges.  IMPROVE aims to enhance European semiconductor fabs efficiency by providing methods and tools to better control the process variability, reduce the cycle time and enhance the effectiveness of the production equipment.